of Helsinki announced that Picosun Oy's SUNALE™ R-150
ALD reactor has been installed and is performing
well at the Laboratory of Inorganic Chemistry.
In making the announcement, Professor Mikko Ritala
"Picosun's SUNALE™ ALD
reactor has now been successfully delivered and
installed. The first test runs gave excellent results
on 150 mm wafers. We are very excited about this
latest addition to our ALD reactor portfolio. One
interesting pathway in near future research will
be a modification of the reactor with the new feature
we have invented and further developed in collaboration
with Picosun. This will add a new dimension to ALD
Kostamo, COO of Picosun Oy, commented: "I
am very glad that University of Helsinki , one of
the most highly regarded institutions of the ALD
society, has approved an ALD reactor from Picosun.
The design of our ALD reactors has matured to the
gamma level which enables us to start high volume
manufacturing of SUNALE™ R-series ALD tools. We are
now drastically scaling up our production due to
the strong customer interest. This, together with
the optimized production processes, enables us to
significantly lower our production costs, which will
turn to the benefit of our customers."
Oy's SUNALE™ R-150 ALD reactor at University
of Helsinki is equipped with the proprietary Picosolid™ heated
source for solid precursors. The reactor is capable
of depositing nanolaminate film structures.
ALD reactors are optimized for Atomic Layer Deposition
method especially for MEMS and nanotechnology research
and application development purposes.
level SUNALE™ R-series ALD reactors can be
equipped with temperature stabilized Picosolution™ liquid
sources, ventilated Picogases™ gas cabinets, proprietary
new type Picosolid™ and Picosolid™ Booster solid
sources for high and low vapour pressure solids and
several different types of Picoloader™ load locks
for manual, semi-automatic or fully automated cassette-to-cassette
more information, please contact Professor Mikko
Ritala, tel. +358 9 191 50 193, firstname.lastname@example.org or
COO Juhana Kostamo, tel. +358 50 3699 565, email email@example.com .