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U.S. Department of Defense Selects Lucent Technologies to Provide Nanotechnology for Advanced Military Systems

Lucent to provide Ultra Dense Large Micro Electro Mechanical Systems Spatial Light Modulators for Maskless Lithography to DARPA


MURRAY HILL, N.J.--(BUSINESS WIRE)--Sept. 7, 2004--
Lucent to provide Ultra Dense Large Micro Electro Mechanical Systems Spatial Light Modulators for Maskless Lithography to DARPA

Lucent Technologies (NYSE:LU) has been selected by the Defense Advanced Research Projects Agency (DARPA) to develop an advanced microsystem that will make the design, engineering and fabrication of next-generation advanced silicon integrated circuits faster, more economical and with increased security for military applications such as transformational communications and homeland security. The four-year contract, N66001-04-C-8028, was awarded by the Space and Naval Warfare Systems Center San Diego, and is valued at $9.5 million, including options.

Lucent will design, develop and demonstrate micro electro mechanical systems (MEMS)-based Spatial Light Modulators (SLMs) that will enable maskless optical lithography.

Lithography is the process of imprinting patterns on semiconductor materials used in integrated circuits. A pattern, or mask, unique for each circuit, is required. Masks are costly, and new masks are needed each time the circuit design has to be modified. In low-volume situations, mask fabrication can become a significant manufacturing cost. Maskless lithography process using MEMS-based SLMs allows manufactures to build circuits without the expense of individual masks. Lucent's unique SLMs enable such circuits to achieve smaller critical dimensions with higher throughput.

The Bell Labs-developed MEMS SLM technology is made possible by advanced nanofabrication. The Lucent SLMs will contain 10 times more individual movable micromirrors, or pixels, than currently available. Individual pixels will be five times smaller and 10 times faster. That means optical maskless lithography systems used in the fabrication of next generation microelectronics can have features as small as 50nm and high throughput.

A MEMS SLM approach makes it possible to manipulate light in ways not previously possible in the fabrication of microdevices. In Lucent's MEMS SLM containing 100 to 200 nanometer features, extremely small mirrors are packed in an integrated multi-megapixel array that reduces requirement for the projection optics needed to achieve small, 50nm, critical dimensions of the next generation integrated circuits. The lower demagnification required for the smaller mirrors allows for a larger image area with the same optical element sizes and projector numerical aperture. This enables throughput that is 10 to 50-times faster than using other current maskless lithography processes, resulting in efficient and cost-effective fabrication.

"One of the most critical barriers in the areas of maskless lithography is the development and implementation of the appropriate beam modulation technology," said Dave Bishop, vice president of nanotechnology research and president, NJ Nanotech Consortium at Bell Labs. "The micromirror technology Lucent is providing to DARPA is a giant leap forward in the area of advanced MEMS designed and engineering, and is being achieved by combining innovative design with our unique MEMS fabrication capability. We foresee this technology having positive impact on such critical areas as homeland security and military transformational communications. "

The Lucent team includes Corning Tropel Corporation, DuPont Photo Masks Inc, Lincoln Laboratories. The work is performed in close partnership with ASML.

About Bell Labs and Lucent Technologies

Bell Labs is the leading source of new communications technologies. It has generated more than 30,000 patents since 1925 and has played a pivotal role in inventing or perfecting key communications technologies, including transistors, digital networking and signal processing, lasers and fiber-optic communications systems, communications satellites, cellular telephony, electronic switching of calls, touch-tone dialing, and modems. Bell Labs scientists have received six Nobel Prizes in Physics, nine U.S. National Medals of Science and eight U.S. National Medals of Technology. For more information about Bell Labs, visit its Web site at

Lucent Technologies designs and delivers the systems, services and software that drive next- generation communications networks. Backed by Bell Labs research and development, Lucent uses its strengths in mobility, optical, software, data and voice networking technologies, as well as services, to create new revenue-generating opportunities for its customers, while enabling them to quickly deploy and better manage their networks. Lucent's customer base includes communications service providers, governments and enterprises worldwide. For more information on Lucent Technologies, which has headquarters in Murray Hill, N.J., USA, visit

About The New Jersey Nanotech Consortium
The New Jersey Nanotechnology Consortium (NJNC) provides rapid and cost-effective access to world-class nanotechnology research and development services. Based at and run by Lucent Technologies' Bell Labs, the NJNC conducts basic and applied nanotechnology research and provides fabrication and packaging capabilities, fulfilling its mission of bringing nanotech ideas from concept to commercialization. The NJNC is also supported by the State of New Jersey, who enables consortium participation for local research universities including Rutgers University, New Jersey Institute of Technology and The University of Medicine and Dentistry of New Jersey. Contacts

Lucent Technologies
Denise Panyik-Dale, 410-290-5572 - office
410-215-4716 - mobile
Rich Teplitsky, 908-582-7500 - office
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