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Unaxis to Supply Korea Advanced Nano Fab Center with 6 VERSALINE Plasma Process Systems for Advanced Compound Semiconductor Nano Device Fabrication

ST. PETERSBURG, Fla.--(BUSINESS WIRE)--May 5, 2005--Unaxis Wafer Processing has announced it will supply the Korea Advanced Nano Fab Center (KANC) with 6 VERSALINE(TM) tools, the newest production system in the Unaxis family of high performance wafer processing equipment. This very large order by the KANC, located at Korean Small Business Center in Suwon, Gyeonggi, Korea, further confirms the acceptance of the VERSALINE by the marketplace, bringing the total number of systems ordered since last year to 30.

The VERSALINE, a modular platform for dry etching applications, is easily customized to specific requirements and budgets without compromising performance. Built on a decade of industry leading plasma process experience, the VERSALINE's specialized ICP, RIE, PECVD and PVD modules provide advanced solutions for applications including LEDs, HBTs, HEMTs, optoelectronics, and MEMS.

Paul Henry, VP of Unaxis Wafer Processing Sales & Marketing, states, "We are very pleased to supply 6 VERSALINEs to the new Korean Advanced Nano Fabrication Center. Unaxis will also be collaborating with KANC in the development of pioneering processes, equipment, and technologies. The VERSALINE will play a key role as it delivers the highest levels of technology on a cost effective, flexible platform satisfying R&D and production requirements." Henry continues, "The now solid market demand for the VERSALINE underscores the strength of Unaxis Wafer Processing and our superior solutions for our customers in Advanced Packaging, Advanced Silicon, Photomask Etching and Compound Semi & Microtechnology."

About Unaxis Wafer Processing

Unaxis Wafer Processing offers innovative production solutions for deposition and etch. These solutions allow production of leading edge chips, devices and components used in PCs, telecommunication and the automotive industry. Close cooperation with key customers and suppliers allows Unaxis to stay at the forefront of technology.

Unaxis Wafer Processing has developed a leading market position in each of its served markets which include: Advanced Packaging, Advanced Silicon, Photomask Etching and Compound Semi & Microtechnology. The Company has a worldwide infrastructure, providing customer support and training through two technology centers and over 40 sales, service and spare parts centers.

Unaxis Wafer Processing is a Division of Unaxis (SWX:UNAX), a globally leading provider of production systems, components, and services for high-technology products based on core competencies in thin film and vacuum technology. Unaxis' commercial activities center on high-growth sectors such as protective coatings for precision tools and components (Coating Services), systems for producing vacuum and conveying process gases (Vacuum Solutions), production systems for data storage devices (Data Storage Solutions), optical components (Optics), and aerospace technology (Space Technology). Unaxis also deploys its core competencies as a major provider of semiconductor technology (Semiconductor Equipment). Unaxis currently employs approximately 6,800 individuals and, in its 2004 financial year, achieved sales of CHF 1,850 million.

For Unaxis Wafer Processing, St. Petersburg
Unaxis Balzers Ltd.
Juerg E. Steinmann, Tel. +423 388 45 15 or
Fax +423 388 65 04
E-Mail: juerg.steinmann@unaxis.com
Unaxis Investor Relations:
Unaxis Management Ltd.
Dr. Philipp Gamper, Tel. +41 58 360 96 22 or
Fax +41 58 360 91 93
E-Mail: philipp.gamper@unaxis.com


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