N.Y.--(BUSINESS WIRE)--Aug. 10, 2005--Veeco Instruments
Inc. (Nasdaq: VECO), a world leader in atomic force
microscopy (AFM) technology, announced today that The
Fraunhofer Center for Nanoelectronic Technology (CNT)
in Dresden, Germany has purchased a Dimension X3D automated
atomic force microscope (AFM). CNT plans to use the
tool for critical dimension metrology for 70nm and
below R&D applications.
CNT is a private-public partnership between Fraunhofer-Gesellschaft
and the industrial partners Infineon Technologies
AG and Advanced Micro Devices (AMD), and has clean-room
facilities adjacent to Infineon. The CNT's objective
is to become a key semiconductor and nanoelectronics
research center, thereby accelerating the introduction
of new semiconductor technologies from R&D
to production. Information on the CNT is available
at www.fraunhofer.de/fhg/EN/press/pi/2004/11/Mediendienst112004Thema7.jsp Funding
for the CNT is provided by the German Ministry of
Education and Research and the free state of Saxony.
to Paul Clayton, Vice President, Business Unit
Manager of Veeco's Automated AFM Business, "We
are pleased that the CNT has chosen our X3D for their
new development center, which is meant to be a research
facility that can develop next generation processes
in a 'real-world' production environment. The X3D's
unique ability to non-destructively measure important
CD elements makes it an important tool for the CNT's
lab-to-fab efforts. AFM metrology continues to increase
in significance as the leading fabs worldwide move
to linewidths below 90nm."
The Dimension X3D AFM is the first nondestructive,
gauge-capable, automated metrology system targeted
to deliver three-dimensional (X, Y, and Z), in-line
critical dimension (CD) metrology for 65nm and 45nm
advanced process development. The X3D gathers detailed
data on crucial CD elements encountered in lithography
and advanced etch processing including gate, STI,
dual-damascene structures, sidewalls and line-edge
variation and now pole shape in data storage. In
addition, the X3D can scan on all materials currently
utilized in the semiconductor and data storage industries,
including new photoresists and Low-k dielectric materials
under development by fabs worldwide.
In addition to an unmatched combination of resolution
and precision, Veeco's AFM product line now features
ease-of-use software that incorporates standardized,
multi-application analysis as well as the capability
to perform sophisticated and detailed evaluations.
This enables an acceleration from yield and process
development to complete in-line production within
a fab. All systems combine low noise AFM capability,
industry-leading repeatability and accuracy, and
exclusive probe technology which are critical to
future development nodes. Veeco has over 300 automated
AFMs installed in fabs worldwide.
Veeco Instruments Inc. provides solutions for nanoscale
applications in the worldwide semiconductor, data
storage, HB-LED/wireless and scientific research
markets. Our Metrology products are used to measure
at the nanoscale and our Process Equipment tools
help create nanoscale devices. Veeco's manufacturing
and engineering facilities are located in New York,
New Jersey, California, Colorado, Arizona and Minnesota.
Global sales and service offices are located throughout
the United States, Europe, Japan and Asia Pacific.
Additional information on Veeco can be found at http://www.veeco.com/ .
To the extent that this news release discusses expectations
about market condition, market acceptance and future
sales of Veeco's products, Veeco's future financial
performance, future disclosures, or otherwise makes
statements about the future, such statements are
forward-looking and are subject to a number of risks
and uncertainties that could cause actual results
to differ materially from the statements made. These
factors include the challenges of continuing weakness
in end market conditions and the cyclical nature
of the compound semiconductor/wireless, data storage,
semiconductor and research markets, risks associated
with integrating acquired businesses and the acceptance
of new products by individual customers and by the
marketplace and other factors discussed in the Business
Description and Management's Discussion and Analysis
sections of Veeco's Annual Report on Form 10-K, subsequent
Quarterly Reports on Form 10-Q and current reports
on Form 8-K.
Veeco Instruments Inc.
Debra Wasser, 516-677-0200 x1472
Fran Brennen, 516-677-0200 x1222