Heidelberg, Germany (PRWEB) August 27, 2005 -- Heidelberg Instruments, GmbH,
Heidelberg, Germany, announced the purchase of a DWL66 maskless lithography
system by Durham University Center for Electronics. The DWL66 is a unique, maskless
lithography system for mask making and direct writing. This system is capable
of producing patterns down to 0.6 microns, and is equipped with the capability
of thick resist and grey scale exposure, in addition to metrology, front to
backside and layer to layer alignment.
"DWL66 systems continue to be a leading platform in direct write laser lithography
applications among the research institutions. We welcome Durham University to
the community of over 80 research institutions who currently use this system
and look forward to a long standing cooperation," Alexander Forozan, Vice President
of World Wide Sales and Marketing, Heidelberg Instruments, GmbH.
"The mask writer will be installed in Durham's School of Engineering and its
primary role will be in the manufacture of high quality holographic optical masks
for the Center for Electronics group. This application concerns holographic lithography
and the need to create amplitude and phase structures on the micron scale. Colleagues
working in our molecular and nanoscale electronics group will also find this
tool useful for creating standard lithography masks and MEMS structures," adds
Dr. Richard McWilliam, Durham University.
About Durham University: Founded in 1832, Durham is a world-class university
located in the City of Durham and has a current role of around 11,000 Undergraduates
and 3,500 Postgraduates. Durham provides a seat of high quality learning and
leading research. In the last Research Assessment Exercise (RAE), 85% of research
staff was rated at 5 or 5* (internationally excellent). The School of Engineering
at Durham teaches general engineering at undergraduate level and has around 40
academic staff and 50 postgraduates. There are three research centers currently
active in the area of microelectronics: the Center for Electronic Systems, the
Center for Molecular and Nanoscale Electronics and the Center for Communications.
The department also accommodates the Center for Electronic-Nano Systems (CENS),
which is a regional organization that actively engages with local industry through
collaborative research and design projects. Facilities at the School include
a state of the art class 100 clean room, microwave communications test suite
and optical laboratory.
About Heidelberg Instruments, GmbH: With an installation base in over 20 countries,
Heidelberg Instruments is a world leader in production of high precision maskless
lithography systems capable of exposing substrates up to 2.4 meter by 1.9 meter.
These systems are used for direct writing and photomask production, in the areas
of MEMS, BioMEMS, Nano Technology, ASICS, TFT, Plasma Displays, Micro Optics,
and many other exciting applications.
Heidelberg Instruments, GmbH
VP, World Wide Sales and Marketing
Phone: +49 6221 3430 73